Wenjiang Shen






CNSI Postdoctoral & CNSI/Hewlett Packard Postdoctoral Scholarship Fellowships

 

Current Research

1. Developing a new nanoscale manufacturing technique — nanoscale electromolecular lithography (NEL), for the fabrication of nanoscale patterns on self-assembled molecular resists by using an electric mask. The NEL will combine the merits of high-speed and scalable top-down engineering techniques with high-resolution bottom-up self-assembly processes to create a practical, reliable, and robust nano-manufacturing technique for general application.



2. Designing and fabricating a nanoimprint mold with ultra-small feature (down to 10nm) by selectively etching of supperlattice layers.



Education

University of California, Los Angeles
Ph.D. in Mechanical Engineering, June 2004
Major field: Microelectromechanical Systems (MEMS)
Minor field: Integrated Circuits and Systems


Tsinghua University, Beijing, P.R. China
M.S. in Materials Science and Engineering, July 2000
B.S. in Materials Science and Engineering, July 1997


Publications

  1. Shen, W., Q. Pei, and Y. Chen, “Electric Lithography by Electrochemical Polymerization” submitted to Appl. Phys. Lett.


  2. Shen, W., R.T. Edwards, and C.-J. Kim , “Fabrication, Packaging and Characterization of Mercury Droplet Switches Integrated on CMOS Chip”, presented in ASME IMECE 2004.


  3. Shen, W., R.T. Edwards, and C.-J. Kim , “Design, Fabrication, and Characterization of Mercury Droplet switc hes Integrated with CMOS Chip”, accepted by JMEMS.


  4. Shen, W., R.T. Edwards, and C.-J. Kim , “Mercury Droplet Microswitch for Re-configurable Circuit Interconnect ”,IEEE Transducers '03 Conf. June 8-12, 2003. Boston, Mass, pp. 464-467.


  5. Shen, W., J. Kim, and C.-J. Kim , “Controlling the Adhesion Force by Physical Surface Modification for Electrostatic Actuation of Microscale Mercury Drop ”,IEEE Conf. MEMS ’ 02. Jan. 2002. Las Vegas, NV, USA, pp. 52-55.


  6. Kim, J., W. Shen, L. Latorre, and C.-J. Kim, “A Micromechanical Switch with Electrostatically Driven Liquid-Metal Droplet ”, Sensors and Actuators, 2002. Vol. A97-98: p. 672-679.


  7. Shen, W., J. Kim, and C.-J. Kim , “Resistance of Liquid-Metal Droplets Against Actuation on Microstructured Surfaces ”,Int. Mechanical Engineering Congress and Exposition, IMECE2001/MEMS-23830. Nov. 2001. New York, NY.


  8. Kim, J., W. Shen, L. Latorre, and C.-J. Kim ,   “A Micromechanical Switch with Electrostatically Driven Liquid-Metal Droplet ”,The 11th International Conference on Solid-State Sensors and Actuators. 2001. Munich, Germany, pp. 748-751.


  9. Dong, S., S . Wang,W . Shen , and L . Li , “ A miniature piezoelectric ultrasonic motor based on circular bending vibration mode”,IEEE/ASME Transactions on Mechatronics, Volume 5,   Issue 4,   Dec 2000, pp. 325-330


  10. Dong, S., W. Shen, H. Qiu, and L. Li, “Piezoelectric-electrorheological planar stepper motor ”, Ferroelectrics, vol.232, pp.235-240, 1999


  11. Dong, S., W. Shen and L. Li, “Rod-type piezoelectric ultrasonic motor based on free bending vibration mode ”, Chinese Patent.


  12. Dong, S., S. Wang, W. Shen, L. Li, and Z. Gui, “ Rod-type ultrasonic mini-motor based on bending vibration mode ” , Journal of Beijing Institute of Technology (English Edition), v 8, n 2, Jun, 1999, pp. 120-127


  13. Dong, S., S. Wang , W. Shen, and L. Li, “ On the friction and noise in piezoelectric ultrasonic motor ”, Shengxue Xuebao/Acta Acustica, v 24, n 3, May, 1999, pp. 321-326

Meeting Abstracts and Presentations

  1. Shen, W., J. Kim, and C.-J. Kim , “Liquid-Metal Droplet Microswitch”, MAE Research and Technology Review 2001, UC Los Angeles , May 18, 2001


  2. Shen, W., and C.-J. Kim , “Controlling the Adhesion Force for Electrostatic Actuation of Microscale Mercury Drop by Physical Surface Modification”, MAE Research and Technology Review 2002, UC Los Angeles , October 22, 2002


  3. Shen, W., R.T. Edwards, and C.-J. Kim , “Programmable Circuit Interconnect Using MEMS Liquid-Metal Microswitches”, NASA/JPL Program Review, Pasadena , CA November 6, 2002


  4. Shen, W., R.T. Edwards, and C.-J. Kim , “MEMS Mercury Microswitches for Re-Configurable Circuit Interconnect”, DARPA / DMEA , The Center for Nanoscience Innovation for Defense (CNID) Review , UC Los Angeles , January 27, 2003

Contact Information

44-116C Engineering IV
420 Westwood Plaza
Los Angeles, CA 90095

Phone: 310-267-4340
E-mail: shenwj@seas.ucla.edu